Author: Registered User

GOLD Etchant

(TKAUSD),(TKAU25)
T

FEATURES
Etching readily controlled with minimum undercutting provides excellent fine line definition.
Room-temperature operated.
Uniform etch rates and fine patterns.
Economical.

DESCRIPTION
GOLD Etchants (TKAUSD/TKAU25) basic formula :
Potassium Iodide + Iodine (KI/I2) solutions
Photoresists (KPR, DYNACHEM, AZ, RISTON, SCREEN RESISTS, etc.) 에 최적의 호환성.
Gold microelectronic circuit의 Photo Fabrication process에 대한 선택적 etch.
Positive/Negative Photoresist coating process를 통해, alumina와 다른 substrate위에 Thin Film에 정확한 electrode와 resistor pattern을 형성.
전자/반도체급 고순도, low sodium. No Cyanide chemistry.
잘 환기된 장소에서 실온 사용.

GOLD ETCHANTS

Model	TKAUSD	TKAU25
Appearance	Dark Red Brown Liquid	Dark Red Brown Liquid
Etchant Type	Immersion(Dip) / Spray	Immersion(Dip) / Spray
Operating Temperature	(20-40℃)Room Temperature	(20-40℃)Room Temperature
Ventilation	Hood Recommended	Hood Recommended
Agitation	Agitation speed로 Etch rate 가속	Agitation speed로 Etch rate 가속
Etch Rate @ 25℃	28Å/sec	50Å/sec
Composition	KI - I2 complex	KI-I2 complex - Phosphate compound
pH range	5.0 - 6.5	5.0 - 6.5
Shelf Life	1 year	1 year
Resist Compatibility	Negative & Positive	Negative & Positive
Rinse	Distilled, Deionized Water	Distilled, Deionized Water
Storage Temp.	직사광선 피하고 Room Temperature, Sealing, ventilated 공간에서 Open
Etch capacity gm/gal	65 gm/gal	65 gm/gal

Etch 호환성(Compatibility)

	TKAUSD
Etch	Al	Au	GaAs	Ag
No Etch(20:1 이상)선택성	Al2O3	Mg ,MgO	Cr, Nb	Fe, Pt	Ru, Ti	Co , C	Si	Si3N4	SiO2	Ta/TaN	W
Slight(20:1이하)	Steel	Ni	Pd

	TKAU25
Etch	Al	Au	GaAs	Ag
No Etch(20:1 이상)선택성	Al2O3	Co, C	Mg, MgO	Cr, Nb	Fe, Pt	Ru, Ti	Si, SiO2	Si3N4	Ta/TaN	W,Ni
Slight(20:1이하) 선택성

APPLICATION
GOLD Immersion Etchant (TKAUSD/TKAS25)는 바로 사용할 수 있음. Microelectronic/Nanoelectronic surface etch layered Gold/Silver chamber/bath 를 장착한 장비 cleaning. Microelectronic/Nanoelectronic surface etch layered Gold/Silver Etch. Alumina,glass,substrate위에 thin film의 정밀한 electrode와 resistor pattern을 형성.

ETCHING TANK / EQUIPMENT/ PACKAGE
Packing : HDPE, glass, epoxy-coated tanks. Heater : quartz, carbon , titanium (nickel or cobalt-steel). Packing Unit :Galon(3.78 L) , 20 Liter.

DISPOSAL OF SPENT ETCHANT
사용된 etchant(TKAUSD/TKAU25)는 승인된 시약 특성별 분리된 폐수 수집용기에 폐기. 승인된 시약 특성별 분리된 폐수 수집용기에 폐기 . 하수구 무단 배출은 추천 않음. 배출은 유해화학물질 폐기에 관한 관련 법률에 따라 폐기.

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