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Uniform etch rates and patterns. Economical DESCRIPTION Moly Etchants (TKMESD basic formula : Buffered, Mildly alkaline Ferricyanide. Negative Photoresists (KPR, KMER, KTFR, etc.) \X 8X1. High Resolution pattern. Moly microelectronic circuitX Photo Fabrication process \  etch. Negative Photoresist coating process| t alumina@ x substrate Thin Film U\electrode@ resistor patternD 1. Ȑ/ij ij, Control uniform etch. X0 nj ( . MOLY ETCHANTS Model TKMESD Appearance Deep Brown Liquid Etchant Type Immersion(Dip) / Spray Operating Temperature 30 - 40 ! Select Compatible Materials Au, Ni, Cu, alumina Select Incompatible Materials Al, Si, Si-O Etch Rate @ 30! 55/sec Time to etch 1 oz, copper 1 1/2 min pH range 10 Storage Temp. Ambient Etch Capacity 30 gm/Gal Shelf Life 1 year Composition Alkaline Ferricyanide Complex Etch 8X1(Compatibility) Etch Al C ZnO Cr Fe GaAs ZnO W No Etch(20:1 t) 1 Al2O3 Au Co ,Cu Nb,Mg Pt,MgO Ru,Ni steel Si3N4 Ti Ta/TaN Slight(20:1tX) 1 Si SiO TKMESD APPLICATION Moly/Tungsten Immersion Etchant (TKMESD) \ `  L. Microelectronic/Nanoelectronic surface etch layered Moly etch. Microelectronic/Nanoelectronic surface etch layered Moly camber/bath | )\ D cleaning. Alumina,glass,substrate thin filmX \ electrode@ resistor patternD 1. ETCHING TANK / EQUIPMENT/ Package Packing : HDPE, glass, or epoxy-coated tanks. Heaters may be quartz, carbon or titanium (nickel or cobalt-steel). Unit :Galon(3.78 L) , 20 Liter. DISPOSAL OF SPENT ETCHANT  etchant(TKMESD) x } 1ļ   ɩ0 0.  etchant(TKMESD) а|Θ(calcium carbonate)<\ T¨ <\ l. Xl 4 0@ ͜ JL. 0@ tTY< 0 \ ( ` 0| 0.  etchant(TKCESD100) а|Θ(calcium carbonate)<\ T¨ <\ l. Xl 0@ ͜ JL. 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