Author: Registered User

Tungsten Etchant

(TKWESD)
T

FEATURES
Etching readily controlled with minimum undercutting provides excellent fine line definition.
Compatible with positive and negative photoresists.
Uniform etch rates and fine patterns.
Economical.

DESCRIPTION
Tungsten Etchants (TKWESD) basic formula :
Buffered,Mildly alkaline Potassium Ferricyanide.
Positive / Negative Photoresists 에 최적의 호환성.
High Resolution pattern & Minimal undercut.
Tungsten microelectronic circuit의 Photo Fabrication process에 대한 선택적 etch.
Positive/Negative Photoresist coating process를 통해, alumina와 다른 substrate위에 Thin Film에 정확한 electrode와 resistor pattern을 형성.
전자/반도체급 고순도, Control Uniform etch, No Cyanide chemistry.
잘 환기된 장소에서 실온 사용.

Tungsten Etchants

Model	TKWESD
Appearance	호박색(Deep Brown) Liquid
Etchant Type	Immersion(Dip) / Spray
Operating Temperature	30 - 40 ℃
Select Compatible Materials	Au, Ni, Cu, alumina
Select Incompatible Materials	Al, Si, Si-O
Etch Rate @ 20℃	30 Å/sec @ 20℃
Composition	Alkaline Ferricyanide complex
pH range
Storage Temp.	Ambient
Resist Compatibility	Negative & Positive
Etch capacity gm/gal	10 oz. /Gal
Storage Temp.	직사광선 피하고 Room Temperature, Sealing, ventilated 공간에서 Open
Shelf Life	1 year
Packing Tank	Polyethylene / Polypropylene

Etch 호환성(Compatibility)

	TKWESD
Etch	Al	C	Cr	Fe	GaAS	W	ZnO
No Etch(20:1 이상)선택성	Al2O3	Au	Co	Cu	Mg, MgO	Nb, Pd	Ni, Pt	Si3N4	steel	Ta/TaN	Ti, Ru
Slight(20:1이하) 선택성	Si	SiO2

APPLICATION
Tungsten Immersion Etchant (TKWESD)는 바로 사용할 수 있음. Microelectronic/Nanoelectronic surface etch layered Tungsten camber/bath 를 장착한 장비 cleaning. Alumina,glass,substrate위에 thin film의 정밀한 electrode와 resistor pattern을 형성.
Microelectronic/Nanoelectronic surface etch layered Tungsten Etch.

ETCHING TANK / EQUIPMENT/ PACKAGE
Packing : HDPE, glass, epoxy-coated tanks. Heater : quartz, carbon , titanium (nickel or cobalt-steel). Packing Unit :Galon(3.78 L) , 20 Liter.

DISPOSAL OF SPENT ETCHANT
사용된 etchant(TKWESD)는 승인된 시약 특성별 분리된 폐수 수집용기에 폐기. 사용된 etchant(TKWESD)는 탄산칼슘(calcium carbonate)으로 중화시킨 후 물로 희석 승인된 시약 특성별 분리된 폐수 수집용기에 폐기 . 하수구 무단 배출은 추천 않음. 배출은 유해화학물질 폐기에 관한 관련 법률에 따라 폐기.

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